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Foundations of MEMS /

Liu, Chang

Foundations of MEMS / Chang Liu - 2nd ed. - Noida : Pearson, c2012. - 576 p. : ill. ; 24 cm.

ISBN: 9788131764756

LCCN:

Subjects--Topical Terms:
Microelectromechanical systems

LC Class. No.: TK7875 / .L48 2012

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Foundations of MEMS /