Zaman, Hasan Process compilation methods for thin film devices : basic algorithms, recipe generation, flow evaluation, and system framework / Hasan Zaman - Saarbrucken, Germany : LAP LAMBERT Academic Publishing, c2010. - xxv, 329 p. : ill., tabs. ; 22 cm. ISBN: 9783838382319 LCCN: Subjects--Topical Terms: AlgorithmsTextbooks. Computer algorithmsTextbooks. Computer algorithmsCongresses. LC Class. No.: QA9.58 / .Z35 2010