TY  - BOOK
AU  - Zaman,Hasan
TI  - Process compilation methods for thin film devices: basic algorithms, recipe generation, flow evaluation, and system framework 
SN  - 9783838382319
AV  - QA9.58 .Z35 2010
PY  - 2010///
CY  - Saarbrucken, Germany
PB  - LAP LAMBERT Academic Publishing
KW  - Algorithms
KW  - Textbooks. Computer algorithms
KW  - Congresses
ER  -