| 000 | nam a22 a 4500 | ||
|---|---|---|---|
| 999 |
_c27128 _d27128 |
||
| 001 | BD-DhNSU-27128 | ||
| 003 | BD-DhNSU | ||
| 005 | 20190403072828.0 | ||
| 008 | 190403s2012 ukna|||g |||| 001 0|eng d | ||
| 010 | _a | ||
| 020 | _a9788131764756 | ||
| 040 |
_aDLC _cDLC _dBD-DhNSU |
||
| 041 | _aeng | ||
| 050 | 0 | 0 |
_aTK7875 _b.L48 2012 |
| 100 | 1 | _aLiu, Chang | |
| 245 | 0 | 0 |
_aFoundations of MEMS / _cChang Liu |
| 250 | _a2nd ed. | ||
| 260 |
_aNoida : _bPearson, _cc2012. |
||
| 300 |
_a576 p. : _bill. ; _c24 cm. |
||
| 650 | 0 | _aMicroelectromechanical systems | |
| 942 |
_2lcc _cBK |
||